{"id":15757,"date":"2025-11-19T10:48:19","date_gmt":"2025-11-19T09:48:19","guid":{"rendered":"https:\/\/www.rjl-microanalytic.de\/?p=15757"},"modified":"2026-01-29T12:03:45","modified_gmt":"2026-01-29T11:03:45","slug":"ultra-schnelle-sem-edx-analyse-von-restschmutzpartikeln-ab-100-%c2%b5m-mit-dem-particlex","status":"publish","type":"post","link":"https:\/\/www.rjl-microanalytic.de\/en\/ultra-schnelle-sem-edx-analyse-von-restschmutzpartikeln-ab-100-%c2%b5m-mit-dem-particlex\/","title":{"rendered":"Ultra-fast SEM-EDX analysis of particles larger 100 \u00b5m with the ParticleX"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"15757\" class=\"elementor elementor-15757\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7934927 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"7934927\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-f3cf1dc\" data-id=\"f3cf1dc\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-72522b7 elementor-widget elementor-widget-text-editor\" data-id=\"72522b7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Component cleanliness according to VDA-19 and ISO-16232 is predominantly evaluated using optical measuring systems such as light microscopes or the <a href=\"https:\/\/www.rjl-microanalytic.de\/en\/instrumente\/microquick-partikelscanner-technische-sauberkeit\/\"><span style=\"text-decoration: underline;\">MicroQuick Particle Scanner<\/span><\/a> However, when optical methods reach their limits, the electron microscope (SEM-EDX) is the measurement system of choice. In addition to the number and size of particles, this technology provides a detailed chemical classification for each individual particle. SEM-EDX analysis is inherently slower than purely optical evaluation, which is why various solutions for accelerated analysis are available.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1e7ce0f elementor-widget elementor-widget-heading\" data-id=\"1e7ce0f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Correlational Approach<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c94954e elementor-widget elementor-widget-text-editor\" data-id=\"c94954e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Some measurement systems employ a correlative approach, in which the filter is first evaluated using light optics. The determined particle coordinates are then used to relocate critical particles (e.g., all particles &gt; 100 \u00b5m) in an electron microscope. While this method sounds appealing, it has a significant drawback: only particles that are optically distinct from the filter (color contrast) can be targeted. Critical particles, such as abrasive minerals, are easily overlooked and therefore cannot be targeted and detected in the SEM.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-45a5037 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"45a5037\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/en\/sand-im-getriebe-abrasive-minerale-im-restschmutz-unsichtbar\/\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-info-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">More about invisible minerals<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4298c1b elementor-widget elementor-widget-heading\" data-id=\"4298c1b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Dynamic Beam Control and Real-Time Imaging<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b976713 elementor-widget elementor-widget-text-editor\" data-id=\"b976713\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>To reliably detect all critical particle types (minerals, metals), it is better to analyze the entire filter using SEM-EDX. Speed is crucial here! The manufacturer Thermo Fisher has also recognized this and developed its <a href=\"https:\/\/www.rjl-microanalytic.de\/en\/sem-edx-rem-edx-analyse\/particlex-sem-edx-restschmutzanalyse-technische-sauberkeit-identifizierung-von-partikeln\/\"><span style=\"text-decoration: underline;\">Phenom ParticleX<\/span><\/a> equipped with various unique features that make the system incomparably fast.<\/p><p>Utilizing a <a href=\"https:\/\/www.rjl-microanalytic.de\/en\/instrumente\/thermo-phenom-particlex-sem-edx-partikelanalyse-cleanliness-gsr-steel-inclusions-powders\/\"><span style=\"text-decoration: underline;\">dynamic beam control,<\/span><\/a> each image field is first coarsely scanned point by point with the electron beam to scan the empty areas as quickly as possible. This saves up to 98 % of imaging time. Only when a particle is detected does the system switch to high-resolution measurement mode. In combination with the CeB6 cathode (10 times higher brilliance compared to tungsten), this speed advantage is further increased, as the following example shows.<\/p><p>Using the <a href=\"https:\/\/www.rjl-microanalytic.de\/en\/sem-edx-rem-edx-analyse\/particlex-sem-edx-restschmutzanalyse-technische-sauberkeit-identifizierung-von-partikeln\/\"><span style=\"text-decoration: underline;\">ParticleX,<\/span> <\/a>we were able to achieve a complete count of all particles &gt; 100 \u00b5m (including EDX and reporting) on a customer's moderately contaminated 47 mm filter in just 15 minutes. We demonstrate the simple operation and the process in a video:<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b6df208 elementor-widget__width-initial elementor-widget elementor-widget-html\" data-id=\"b6df208\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"html.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<iframe width=\"580\" height=\"425\" src=\"https:\/\/www.youtube-nocookie.com\/embed\/oHe7zZC6oTQ?rel=0&showinfo=0&loop=1&modestbranding=1\" frameborder=\"0\" allow=\"autoplay; encrypted-media\" allowfullscreen><\/iframe>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b5a7ac7 elementor-widget elementor-widget-text-editor\" data-id=\"b5a7ac7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The speed advantage is also evident in analyses of smaller particle sizes.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c18ec36 elementor-widget elementor-widget-elementskit-tablepress\" data-id=\"c18ec36\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"elementskit-tablepress.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elemenetskit-tablepress ekit-wid-con\" id=\"ekit_tablepress_c18ec36\">\n<table id=\"tablepress-3\" class=\"tablepress tablepress-id-3\">\n<thead>\n<tr class=\"row-1\">\n\t<th class=\"column-1\">Particles larger than<\/th><th class=\"column-2\">Particle count analyzed<\/th><th class=\"column-3\">Duration including setup time<\/th>\n<\/tr>\n<\/thead>\n<tbody class=\"row-striping row-hover\">\n<tr class=\"row-2\">\n\t<td class=\"column-1\">100 \u00b5m<\/td><td class=\"column-2\">37<\/td><td class=\"column-3\">17 min<\/td>\n<\/tr>\n<tr class=\"row-3\">\n\t<td class=\"column-1\">50 \u00b5m<\/td><td class=\"column-2\">211<\/td><td class=\"column-3\">21 min<\/td>\n<\/tr>\n<tr class=\"row-4\">\n\t<td class=\"column-1\">25 \u00b5m<\/td><td class=\"column-2\">2220<\/td><td class=\"column-3\">51 min<\/td>\n<\/tr>\n<tr class=\"row-5\">\n\t<td class=\"column-1\">10 \u00b5m<\/td><td class=\"column-2\">13127<\/td><td class=\"column-3\">2 h 48 min<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bed9d78 elementor-widget elementor-widget-text-editor\" data-id=\"bed9d78\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>These results show that a correlational approach in the standard analysis range (&gt; 50 \u00b5m) usually does not result in any time savings. Therefore, for critical particle types (minerals, metals), we always recommend a complete filter analysis using SEM-EDX.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f58b982 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"f58b982\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/en\/instrumente\/thermo-phenom-particlex-sem-edx-partikelanalyse-cleanliness-gsr-steel-inclusions-powders\/\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-info-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">More About Phenom ParticleX<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/en\/sem-edx-rem-edx-analyse\/particlex-sem-edx-restschmutzanalyse-technische-sauberkeit-identifizierung-von-partikeln\/\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-info-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">More about technical cleanliness using SEM-EDX<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/en\/company\/kontakt\/\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-info-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">You can contact us here<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>With modern SEM-EDX instruments, particle analysis of the entire filter is usually faster than a correlative approach. The Phenom ParticleX automates residual contamination analysis; no expert knowledge is required. And best of all: A single pass for particles as small as 100 \u00b5m typically takes only about 15 minutes. Watch the video to see for yourself!<\/p>","protected":false},"author":1,"featured_media":15806,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[9,11,12],"tags":[14,22,32,68,38,39,41,43,44,45,49,50],"class_list":["post-15757","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-innovative-analytik","category-analyse-technische-sauberkeit","category-elektronenmikroskopie-sem-edx","tag-bauteilsauberkeit","tag-iso-16232","tag-partikelanalyse","tag-prueflabor","tag-restschmutz","tag-restschmutzanalyse","tag-roentgenelementanalyse","tag-sauberkeitsanalyse","tag-sauberkeitspruefung","tag-sem-edx","tag-technische-sauberkeit","tag-vda-19"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/posts\/15757","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/comments?post=15757"}],"version-history":[{"count":39,"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/posts\/15757\/revisions"}],"predecessor-version":[{"id":15807,"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/posts\/15757\/revisions\/15807"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/media\/15806"}],"wp:attachment":[{"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/media?parent=15757"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/categories?post=15757"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.rjl-microanalytic.de\/en\/wp-json\/wp\/v2\/tags?post=15757"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}