COXEM COMPACT ION POLISHER
Innovative Ion Beam Milling & Etching System for SEM Target Preparation
Cross-Sectioning and Polishing
Compact Ion Polisher IP-10K
- Etching rate: 1000 µm/h (on Si at 8 kV)
- High voltage variable 2-8 kV
- Working gas: argon
- Digital microscope to align the sample
- In-chamber microscope for monitoring the etching beam
Cross Sectioning
- Largest sample: 20 × 10 × 5.5mm or 16 × 10 × 9.5mm (L x W x H)
- Motorized stage: X: ± 3.5 mm / Y: ± 2 mm
- Motorized swing: +/- 35°
Polishing (Flat Milling)
- Largest sample: Ø32 x 18 (H) mm
- Angle variable to the etching beam: 10-90°
Cooling Module
- Peltier-type sample cooling (down to -20°C) for heat-sensitive samples
Air Protection Module
- Safe sample transport between IP-10K and SEM for air-sensitive samples (e.g., battery applications)
Ion polisher IP-8K
- the smaller sister model IP-8K is available for pure cross-sectioning applications
- Rate of etching: 700 µm/h (on Si at 8 kV)
- Other specifications identical to IP-10K
Video
How COXEM IP-10K works
The Coxem brand is enjoying an increasing popularity worldwide and stands for compact SEM-EDX instruments with an excellent price-performance ratio.
The latest development from the Korean team at Coxem is the IP-10K ion beam etching device, which can be operated easily and intuitively via touchscreen. Even beginners can successfully prepare SEM targets with this device!
The system convinces with its intelligent sample holders, which are fixed to the stage by a magnet. An HD camera makes it possible to observe the ion beam etching process live, which improves safety when preparing the target. You can save your individual recipes in an internal database for later use.
