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Simultaneous Microscopic Examination & Elemental Analysis
SEM-EDX
Functional principle in focus
In scanning electron microscopy (SEM), a focused primary electron beam is rastered stepwise across the sample. At each pixel, the reflected electrons are detected, yielding a microscopic greyscale image of the sample. There are two imaging techniques:
Backscattered electrons (BE) → material contrast
Secondary electrons (SE) → topography contrast
In addition, the primary electron beam triggers the sample to emit characteristic X-Rays. The elements in the sample as well as their respective modal weights can be precisely determined by analyzing the color spectrum in an EDX detector.

Applications
- Investigation of Damage and wear on a microscopic level
- Analysis of aging, corrosion and oxidation of components
- provenance the failure leading particles, chips and particles
- particle analysis for the determination of the technical cleanliness
- analysis non-metallic inclusions in steels and other metals
- Error analysis in the delamination of coatings and paints
- Investigation of electrical contact problems
- Analysis of surfaces and coatings
- Material determination and microstructural analysis
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Scanning electron microscopy
Prof. Dr.-Ing. Rainer Schwab, University of Karlsruhe